Required - TTE - 4062 - KLA / TENCOR SurfScan 7600
Specification
Reference Number
TTE - 4062Product
KLA / TENCOR SurfScan 7600Product Details
KLA / TENCOR 7600 Surfscan, 4", 5", 6", 8"
Specifications:
- Substrate thickness: Standard
- Patterned wafers: Sensitivity depends on the surface roughness and geometrical pattern on the wafer being scanned
- Particle sensitivity: 0.15 mm diameter latex spheres on bare silicon and patterned process wafers
- Spatial resolution: 50 mm minimum spacing between particles
- Wafer rotation: System will accept up to ± 3.0° pattern rotation relative to the flat or notch
- Scanning beam: 104 laser scans per second
- Light source: Argon ion laser rated for 30 milliwatts
- Substrate speed: 2.6 mm/s forward motion speed while scanning
- Throughput: 30 wafers per hour for 8" wafers in normal load-measure-unload cycles. Throughput for smaller wafers will be higher in Hi Thruput mod
- Temperature: 18° C - 22° C (64° F - 72° F)
- Air quality: Class 10 or better. Minimum depth for laminar flow is 36"
- Vacuum: 20" (500 mm) Hg/min. at 0.5 cfm/min. Vacuum must be clean and filtered, without oil or vapor backstreaming
- Compressed Dry Air/ Dry Nitrogen: 0.125-in. inner diameter, 0.250-in. outer diameter tube shutoff fitting CPC (Trade Number MDC-20-04) or equivalent
- Vacuum hose: 0.125 in. inside diameter, 0.250 in. outer diameter
- Venting: 180 cfm total
- Exhaust hoses: (2) 4-in. diameter hoses
- Computer: AT-compatible, 33 MHz 80486 CPU
- Hard disk: 116 MB disk (81 MB for data storage, 35 MB for program and recipe storage)
- Floppy-diskette drive: 3.5 in. high density (1.44 MB)
- Printer: Parallel interface to optional Epson EX800, Hewlett-Packard Paint Jet, or equivalent. Minimum buffer RAM, 32KB. An adapter is provided for connection to one of the IEC power outlets to the rear of the service tunnel
Comm port (optional): One male serial RS-232C port connector for use as SECS-II port.
Note: A gender changer is provided for use with the standard SECS cable
System Power:
- 200-240 VAC ± 10%
- 50-60 Hz
- 3.5 KVA (either single phase or two phases from a three-phase "Y" configuration) with earth ground
- The facility earth ground connection must be less than 0.5 ohms
- The Surfscan 7600 power line cord has been factory wired to accept a NEMA L6-20R outlet
- The outlet should be within 4 ft. of the rear of the scan unit
- 20-amp circuit breaker recommended
Located in USA
Specifications:
- Substrate thickness: Standard
- Patterned wafers: Sensitivity depends on the surface roughness and geometrical pattern on the wafer being scanned
- Particle sensitivity: 0.15 mm diameter latex spheres on bare silicon and patterned process wafers
- Spatial resolution: 50 mm minimum spacing between particles
- Wafer rotation: System will accept up to ± 3.0° pattern rotation relative to the flat or notch
- Scanning beam: 104 laser scans per second
- Light source: Argon ion laser rated for 30 milliwatts
- Substrate speed: 2.6 mm/s forward motion speed while scanning
- Throughput: 30 wafers per hour for 8" wafers in normal load-measure-unload cycles. Throughput for smaller wafers will be higher in Hi Thruput mod
- Temperature: 18° C - 22° C (64° F - 72° F)
- Air quality: Class 10 or better. Minimum depth for laminar flow is 36"
- Vacuum: 20" (500 mm) Hg/min. at 0.5 cfm/min. Vacuum must be clean and filtered, without oil or vapor backstreaming
- Compressed Dry Air/ Dry Nitrogen: 0.125-in. inner diameter, 0.250-in. outer diameter tube shutoff fitting CPC (Trade Number MDC-20-04) or equivalent
- Vacuum hose: 0.125 in. inside diameter, 0.250 in. outer diameter
- Venting: 180 cfm total
- Exhaust hoses: (2) 4-in. diameter hoses
- Computer: AT-compatible, 33 MHz 80486 CPU
- Hard disk: 116 MB disk (81 MB for data storage, 35 MB for program and recipe storage)
- Floppy-diskette drive: 3.5 in. high density (1.44 MB)
- Printer: Parallel interface to optional Epson EX800, Hewlett-Packard Paint Jet, or equivalent. Minimum buffer RAM, 32KB. An adapter is provided for connection to one of the IEC power outlets to the rear of the service tunnel
Comm port (optional): One male serial RS-232C port connector for use as SECS-II port.
Note: A gender changer is provided for use with the standard SECS cable
System Power:
- 200-240 VAC ± 10%
- 50-60 Hz
- 3.5 KVA (either single phase or two phases from a three-phase "Y" configuration) with earth ground
- The facility earth ground connection must be less than 0.5 ohms
- The Surfscan 7600 power line cord has been factory wired to accept a NEMA L6-20R outlet
- The outlet should be within 4 ft. of the rear of the scan unit
- 20-amp circuit breaker recommended
Located in USA
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